00773cam a2200241 7i4500 0000011381 20150325090000.0 iicp-my 20060309112400.0 050401 000 0 eng d 0471232793 200603091124 Yusnizam 200602281510 muna 200504081122 Yusnizam 200504011657 Yusnizam 621.3815 MAY May, Gary S. Fundamentals of semiconductor fabrication / by Gary S. May and Simon M. Sze.. International edition.. United State: John Wiley, 2004.. p.;: ill.; cm.. Includes index. Engineering. semiconductor. Sze, Simon M. 1000019134 Book Green Spot