Cover Image

Fundamentals of semiconductor fabrication / by Gary S. May and Simon M. Sze..

Main Author: May, Gary S.
Other Authors: Sze, Simon M.
Language:English
Published: United State: John Wiley, 2004..
Edition:International edition..
Subjects:
Engineering.
semiconductor.
Item Description:Includes index.
Physical Description:p.;: ill.; cm..
ISBN:0471232793

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