May, G. S., & Sze, S. M. (2004). Fundamentals of semiconductor fabrication / by Gary S. May and Simon M. Sze. (International edition.). United State: John Wiley.
Chicago Style CitationMay, Gary S., and Simon M. Sze. Fundamentals of Semiconductor Fabrication / By Gary S. May and Simon M. Sze. International edition. United State: John Wiley, 2004.
MLA CitationMay, Gary S., and Simon M. Sze. Fundamentals of Semiconductor Fabrication / By Gary S. May and Simon M. Sze. International edition. United State: John Wiley, 2004.
Warning: These citations may not always be 100% accurate.