00775cam a2200229 7i4500 0000011328 20150325090000.0 iicp-my 20041216103900.0 041216s2001 njua b 001 0 eng 0131911368 200412161039 Yusnizam 200412161018 Yusnizam 621.38152 XIA Xiao, Hong. Introduction to semiconductor manufacturing technology by Hong Xiao.. International ed.. Upper Saddle River, N.J.: Prentice Hall, c2001.. p.: ill.; cm.. Includes bibliographical references and index. Semiconductors -- Design and construction. Semiconductor industry. 1000019075 Book Green Spot