Introduction to semiconductor manufacturing technology

Main Author: Xiao, Hong.
Language:English
Published: Upper Saddle River, N.J.: Prentice Hall, c2001..
Edition:International ed..
Subjects:
LEADER 00775cam a2200229 7i4500
001 0000011328
005 20150325090000.0
003 iicp-my
005 20041216103900.0
008 041216s2001 njua b 001 0 eng
020 |a 0131911368  
039 9 |a 200412161039  |b Yusnizam  |y 200412161018  |z Yusnizam 
090 0 0 |a 621.38152   |b XIA 
100 1 |a Xiao, Hong.  
245 0 0 |a Introduction to semiconductor manufacturing technology   |c by Hong Xiao.. 
250 |a International ed.. 
260 |a Upper Saddle River, N.J.:   |b Prentice Hall,   |c c2001.. 
300 |a p.:   |b ill.;   |c cm.. 
500 |a Includes bibliographical references and index. 
650 0 |a Semiconductors --   |x Design and construction.  
650 0 |a Semiconductor industry.  
999 |a 1000019075  |b Book  |c Green Spot