|  |  |  |  | 
| LEADER | 00812cam a2200241 7i4500 | 
| 001 | 0000011320 | 
| 005 | 20150325090000.0 | 
| 003 | iicp-my | 
| 005 | 20060310152000.0 | 
| 008 | 041126s2001    njua     b    001 0 eng | 
| 020 |  |  | |a 0131229370 | 
| 039 |  | 9 | |a 200603101520 
  |b Yusnizam 
  |y 200411261213 
  |z Yusnizam | 
| 090 | 0 | 0 | |a 621.38152  
  |b QUI | 
| 100 | 1 |  | |a Quirk, Michael | 
| 245 | 0 | 0 | |a Semiconductor manufacturing technology   
  |c by Michael Quirk and Julian Serda.. | 
| 250 |  |  | |a International ed.. | 
| 260 |  |  | |a Upper Saddle River, NJ:  
  |b Prentice Hall,  
  |c 2001.. | 
| 300 |  |  | |a p.:  
  |b ill.;  
  |c cm.. | 
| 500 |  |  | |a Includes bibliographical references  and index. | 
| 650 |  | 0 | |a Electronic industries. | 
| 650 |  | 0 | |a Semiconductors --  
  |x Design and construction. | 
| 700 | 1 |  | |a Serda, Julian. | 
| 999 |  |  | |a 1000019062 
  |b Book 
  |c Green Spot |