Description: Semiconductor manufacturing technology

Main Author:	Quirk, Michael
Other Authors:	Serda, Julian.
Language:	English
Published:	Upper Saddle River, NJ: Prentice Hall, 2001..
Edition:	International ed..
Subjects:	Electronic industries. Semiconductors -- > Design and construction.

Item Description:	Includes bibliographical references and index.
Physical Description:	p.: ill.; cm..
ISBN:	0131229370