00946cam a2200265 7i4500 0000011272 20150325090000.0 iicp-my 20060619105900.0 041005 000 0 eng d 0201444947 200606191059 muna 200602141706 muna 200502241158 muna 200410051107 Yusnizam 621.3952 JAE Jaeger, Richard C. Introduction to microelectronic fabrication by Richard C. Jaeger. 2nd ed.. New Jersey: Prentice Hall, 2002. p.;; cm. Modular series on solid state devices ; SOEAT - MEEUB - EGE246 (Text). Integrated circuits -- Very large scale integration - Design and construction - Congress. Engineering. 1000019006 Book Green Spot 1000019640 Book Orange Spot 1000019641 Book White Spot