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|a Jaeger, Richard C.
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|a Introduction to microelectronic fabrication /
|c by Richard C. Jaeger.
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|a 2nd ed..
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|b Prentice Hall,
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|a Modular series on solid state devices ;
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|a SOEAT - MEEUB - EGE246 (Text).
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|a Integrated circuits --
|x Very large scale integration - Design and construction - Congress.
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|a Engineering.
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