Introduction to microelectronic fabrication
| Main Author: | |
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| Language: | English |
| Published: |
New Jersey:
Prentice Hall,
2002.
|
| Edition: | 2nd ed.. |
| Series: | Modular series on solid state devices ;
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| Subjects: |
| Item Description: | SOEAT - MEEUB - EGE246 (Text). |
|---|---|
| Physical Description: | p.;; cm. |
| ISBN: | 0201444947 |