Introduction to microelectronic fabrication
| Main Author: | |
|---|---|
| Language: | English | 
| Published: | New Jersey:
        Prentice Hall,
    
      2002. | 
| Edition: | 2nd ed.. | 
| Series: | Modular series on solid state devices ; | 
| Subjects: | 
| Item Description: | SOEAT - MEEUB - EGE246 (Text). | 
|---|---|
| Physical Description: | p.;; cm. | 
| ISBN: | 0201444947 |