Jaeger, R. C. (2002). Introduction to microelectronic fabrication (2nd ed.). New Jersey: Prentice Hall.
Chicago Style CitationJaeger, Richard C. Introduction to Microelectronic Fabrication. 2nd ed. New Jersey: Prentice Hall, 2002.
MLA CitationJaeger, Richard C. Introduction to Microelectronic Fabrication. 2nd ed. New Jersey: Prentice Hall, 2002.
Warning: These citations may not always be 100% accurate.